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Heidelberg Instruments

Manufacturer of maskless laser lithography systems, direct write lithography systems, photomask writers, and nanofabrication tools for research and industrial production.

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For agents: Manufacturer of maskless laser lithography systems, photomask writers and nanofabrication tools for research and industrial production.

maskless lithographylaser lithographyphotomask writersnanofabricationdirect write

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listed
llms.txt
https://heidelberg-instruments.com/llms.txt
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#544960
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Germany
Categories
Industry and manufacturing · Science and research
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Documentation: developer or product docs worth reading, nothing to call
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business · agents can: read docs, search content · en
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2026-10-19T10:43:57.621Z
Last checked
2026-10-21T06:15:16.284Z
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Their llms.txt

The beginning of the file, from our validated copy saved 2026-10-21T06:15:03.084Z. Cached copy · Source on heidelberg-instruments.com

# Heidelberg Instruments

> Manufacturer of maskless laser lithography systems, direct write lithography systems, photomask writers, and nanofabrication tools for research and industrial production.

Heidelberg Instruments develops and manufactures advanced lithography and nanofabrication systems for academia, research institutes, and industrial customers worldwide. The product portfolio ranges from compact research tools to high-throughput production systems for photomask manufacturing and semiconductor applications.

## Products

- [µMLA Maskless Aligner](https://heidelberg-instruments.com/product/μmla/): Compact tabletop aligner with raster scan and vector exposure modules
- [MLA 150 Maskless Aligner](https://heidelberg-instruments.com/product/mla150/): Fastest maskless tool for rapid prototyping and binary lithography
- [MLA 300 Maskless Aligner](https://heidelberg-instruments.com/product/mla300/): Industrial maskless aligner for high-precision production lines
- [DWL 66+ Laser Lithography System](https://heidelberg-instruments.com/product/dwl-66/): R&D system with 200 nm resolution and 65 536-level grayscale
- [DWL 2000 GS / DWL 4000 GS](https://heidelberg-instruments.com/product/dwl-2000-4000-gs/): Advanced industrial grayscale lithography systems
- [VPG 300 DI Maskless Stepper](https://heidelberg-instruments.com/product/vpg-300-di/): High-accuracy direct imager for microstructures
- [VPG+ 200 / 400 / 800 Volume Pattern Generators](https://heidelberg-instruments.com/product/vpg-200-400-800/): Production tools for standard photomasks in i-line resists
- [VPG+ 1400 FPD / 1850 FPD](https://heidelberg-instruments.com/product/vpg-1400-1850-fpd/): Large-substrate photomask writers for display applications
- [ULTRA Semiconductor Mask Writer](https://heidelberg-instruments.com/product/ultra/): Mature-node semiconductor photomask production
- [NanoFrazor Nanolithography Tool](https://heidelberg-instruments.com/product/nanofrazor/): Thermal scanning probe lithography for nanoscale patterning

## Core Technologies

- [Maskless Laser Lithography](https://heidelberg-instruments.com/core-technologies/maskless-laser-lithography/)
- [Thermal Scanning Probe Lithography](https://heidelberg-instruments.com/core-technologies/thermal-scanning-probe-lithography/)
- [Grayscale Lithography](https://heidelberg-instruments.com/core-technologies/grayscale-lithography/)
- [High & Ultra-High Resolution](https://heidelberg-instruments.com/core-technologies/high-ultra-high-resolution/)
- [Accurate Pattern Placement](https://heidelberg-instruments.com/core-technologies/accurate-pattern-placement/)
- [In-Situ Inspection & Metrology](https://heidelberg-instruments.com/core-technologies/in-situ-inspection-metrology/)
- [Non-Invasive Nanolithography](https://heidelberg-instruments.com/core-technologies/non-invasive-nanolithography/)

## Applications

- [Advanced Packaging](https://heidelberg-instruments.com/applications/advanced-packaging/)
- [Biotechnology and Medical Engine
…

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